This course covers the role of MEMS sensors in enabling the Internet of Things, including topics such as timing circuits, MEMS gyroscope chips, laser scanners, and Texas Instruments DLP technology. Students will learn about capacitive measurement of displacement, silicon micromechanical devices, MEMS materials, and fabrication techniques like anisotropic etching of silicon and deep reactive ion etching. The course explores the integration of smart sensors, MEMS, and electronics in applications such as autonomous vehicles and wearable sensors. The intended audience for this course is individuals interested in understanding how smart sensors contribute to the development of smart networks in the Internet of Things.